A computational study of gas-phase and surface reactions in...

Journal of Crystal Growth 2004 Vol. 268; Iss. 1-2

A computational study of gas-phase and surface reactions in deposition and etching of GaAs and AlAs in the presence of HCl

Carlo Cavallotti, Istvan Lengyel, Maria Nemirovskaya, Klavs F. Jensen
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Volume:
268
Year:
2004
Language:
english
Pages:
20
DOI:
10.1016/j.jcrysgro.2004.04.033
File:
PDF, 742 KB
english, 2004
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