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Oxygen-transport phenomena in a small silicon Czochralski furnace
You-Rong Li, Ming-Wei Li, Nobuyuki Imaishi, Yasunobu Akiyama, Takao TsukadaVolume:
267
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.jcrysgro.2004.04.049
File:
PDF, 610 KB
english, 2004