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Reproducible defect etching of SiC single crystals
D. Siche, D. Klimm, T. Hölzel, A. WohlfartVolume:
270
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2004.05.098
File:
PDF, 241 KB
english, 2004