Orientation selective epitaxial growth of CeO layers on...

Orientation selective epitaxial growth of CeO layers on Si(1 0 0) substrates using reactive DC magnetron sputtering with substrate bias

Tomoyasu Inoue, Masayuki Ohashi, Naomichi Sakamoto, Shigenari Shida
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Volume:
271
Year:
2004
Language:
english
Pages:
8
DOI:
10.1016/j.jcrysgro.2004.07.052
File:
PDF, 424 KB
english, 2004
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