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In situ stress measurements during MOCVD growth of AlGaN on SiC
Jeremy D. Acord, Srinivasan Raghavan, David W. Snyder, Joan M. RedwingVolume:
272
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.jcrysgro.2004.08.033
File:
PDF, 356 KB
english, 2004