Chemical kinetics and design of gas inlets for III–V growth...

Journal of Crystal Growth 2004 Vol. 272; Iss. 1-4

Chemical kinetics and design of gas inlets for III–V growth by MOVPE in a quartz showerhead reactor

Zhi-qiang Li, Vivian Zhou, Simon Li, T. Sudersena Rao, W.Y. Jiang, S.P. Watkins
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Volume:
272
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2004.08.112
File:
PDF, 313 KB
english, 2004
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