Defect elimination in solid-phase crystallised Si thin...

Thin Solid Films 2015 / 02 Vol. 576

Defect elimination in solid-phase crystallised Si thin films by line-focus diode laser annealing

Li, Wei, Varlamov, Sergey, Huang, Jialiang
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Volume:
576
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.12.033
Date:
February, 2015
File:
PDF, 1.90 MB
english, 2015
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