Empirical inference of in situ wafer sagging in Si epitaxy...

Empirical inference of in situ wafer sagging in Si epitaxy using pocket susceptor

Tien Y. Wang
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Volume:
273
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.jcrysgro.2004.09.081
File:
PDF, 783 KB
english, 2005
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