Effects of sputtering power on the properties of ZnO:Ga...

Effects of sputtering power on the properties of ZnO:Ga films deposited by r.f. magnetron-sputtering at low temperature

Xuhu Yu, Jin Ma, Feng Ji, Yuheng Wang, Xijian Zhang, Chuanfu Cheng, Honglei Ma
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Volume:
274
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2004.10.037
File:
PDF, 283 KB
english, 2005
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