Modeling of epitaxial silicon carbide deposition
Alessandro Veneroni, Fabrizio Omarini, Davide Moscatelli, Maurizio Masi, Stefano Leone, Marco Mauceri, Giuseppe Pistone, Giuseppe AbbondanzaVolume:
275
Year:
2005
Language:
english
Pages:
1
DOI:
10.1016/j.jcrysgro.2004.10.104
File:
PDF, 328 KB
english, 2005