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Fast epitaxy by PVT of SiC in hydrogen atmosphere
M. Syväjärvi, R.R. Ciechonski, G.R. Yazdi, R. YakimovaVolume:
275
Year:
2005
Language:
english
Pages:
1
DOI:
10.1016/j.jcrysgro.2004.11.129
File:
PDF, 342 KB
english, 2005