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Simultaneous determination of composition and growth rate of MOCVD nitrides by in situ multiple wavelength ellipsometry
Klaus Schmidegg, Gerold Neuwirt, Helmut Sitter, Alberta BonanniVolume:
275
Year:
2005
Language:
english
Pages:
1
DOI:
10.1016/j.jcrysgro.2004.11.192
File:
PDF, 191 KB
english, 2005