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Microstructural evolution and formation of highly c-axis-oriented aluminum nitride films by reactively magnetron sputtering deposition
Wen-Jen Liu, Shih-Jeh Wu, Chih-Min Chen, Yin-Chieh Lai, Chun-Han ChuangVolume:
276
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.jcrysgro.2004.11.421
File:
PDF, 520 KB
english, 2005