Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2013 / 11 Vol. 31; Iss. 6
![](/img/cover-not-exists.png)
Nanostructuring of free-standing, dielectric membranes using electron-beam lithography
Olav Grepstad, Jon, Greve, Martin M., Reisinger, Thomas, Holst, BodilVolume:
31
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4820019
Date:
November, 2013
File:
PDF, 1.53 MB
english, 2013