Silicide formation by pulsed-incoherent-light annealing

Silicide formation by pulsed-incoherent-light annealing

John, P. K., Gecim, S., Suda, Y., Tong, B. Y., Wong, S. K.
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Volume:
63
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p85-142
Date:
June, 1985
File:
PDF, 405 KB
english, 1985
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