Dynamic tuning of MEMS resonators via electromechanical...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2015 / 1 Vol. 62; Iss. 1

Dynamic tuning of MEMS resonators via electromechanical feedback

Norouzpour-Shirazi, Arashk, Hodjat-Shamami, Mojtaba, Tabrizian, Roozbeh, Ayazi, Farrokh
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Volume:
62
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/tuffc.2014.006570
Date:
January, 2015
File:
PDF, 5.27 MB
english, 2015
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