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The degradation of ferroelectric properties of PZT thin films due to plasma damage
Ishihara, Kazuya, Ishikawa, Tomohiro, Hamada, Kazuwki, Onishi, Sigeo, Kudo, Jun, Sakiyama, KeizoVolume:
6
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589508019373
Date:
January, 1995
File:
PDF, 277 KB
english, 1995