Liquid phase homoepitaxial growth of 6H-SiC on oriented...

Liquid phase homoepitaxial growth of 6H-SiC on oriented substrates

O. Filip, B. Epelbaum, Z.G. Herro, M. Bickermann, A. Winnacker
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Volume:
282
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2005.05.013
File:
PDF, 278 KB
english, 2005
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