Effect of template layer on formation of flat-surface...

Journal of Crystal Growth 2006 Vol. 289; Iss. 1

Effect of template layer on formation of flat-surface β-FeSi2 epitaxial films on (1 1 1) Si by metal-organic chemical vapor deposition

Kensuke Akiyama, Yasuo Hirabayashi, Satoru Kaneko, Takeshi Kimura, Shintaro Yokoyama, Hiroshi Funakubo
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Volume:
289
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.jcrysgro.2005.10.111
File:
PDF, 781 KB
english, 2006
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