MOCVD growth of thick AlN and AlGaN superlattice structures...

Journal of Crystal Growth 2006 Vol. 287; Iss. 2

MOCVD growth of thick AlN and AlGaN superlattice structures on Si substrates

M.A. Mastro, C.R. Eddy Jr., D.K. Gaskill, N.D. Bassim, J. Casey, A. Rosenberg, R.T. Holm, R.L. Henry, M.E. Twigg
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Volume:
287
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2005.10.119
File:
PDF, 315 KB
english, 2006
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