Hexamethyldisilane/propane versus silane/propane...

Semiconductor Science and Technology 2003 / 12 Vol. 18; Iss. 12

Hexamethyldisilane/propane versus silane/propane precursors: application to the growth of high-quality 3C–SiC on Si

Ferro, G, Camassel, J, Juillaguet, S, Balloud, C, Polychroniadis, E K, Stoemenos, Y, Dazord, J, Peyre, H, Monteil, Y, Rushworth, S A, Smith, L M
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Volume:
18
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/18/12/303
Date:
December, 2003
File:
PDF, 566 KB
english, 2003
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