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Growth of nitrogen-doped SiC boules by halide chemical vapor deposition
M. Fanton, D. Snyder, B. Weiland, R. Cavalero, A. Polyakov, M. Skowronski, H. ChungVolume:
287
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2005.11.044
File:
PDF, 161 KB
english, 2006