Profile control of novel non-Si gates using BCl[sub...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2007 Vol. 25; Iss. 3

Profile control of novel non-Si gates using BCl[sub 3]∕N[sub 2] plasma

D. Shamiryan, V. Paraschiv, S. Eslava-fernandez, M. Demand, M. Baklanov, S. Beckx, W. Boullart
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Volume:
25
Year:
2007
Language:
english
DOI:
10.1116/1.2731333
File:
PDF, 721 KB
english, 2007
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