Asymmetric distributions of grown-in microdefects in...

Journal of Crystal Growth 2006 Vol. 289; Iss. 2

Asymmetric distributions of grown-in microdefects in Czochralski silicon

Hyon-Jong Cho, Bok-cheol Sim, Jeong Yong Lee
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Volume:
289
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2005.12.015
File:
PDF, 389 KB
english, 2006
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