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Visualization of the Effect of Liquid Dispensing Method during Spin Coating
Huang, Kuo-Hsin, Chou, Fu-Chu, Yang, Cheng-PinVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.5238
Date:
August, 2007
File:
PDF, 406 KB
english, 2007