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Investigation of Si/SiGe/Si on bonded silicon-on-insulator by triple-axis X-ray diffraction and synchrotron radiation double-crystal topography
Tongda Ma, Hailing Tu, Guangyong Hu, Beiling Shao, Ansheng LiuVolume:
289
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2005.12.102
File:
PDF, 280 KB
english, 2006