Photoresist-Derived Carbon for Microelectromechanical...

Photoresist-Derived Carbon for Microelectromechanical Systems and Electrochemical Applications

Ranganathan, Srikanth, McCreery, Richard, Majji, Sree Mouli, Madou, Marc
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393188
File:
PDF, 394 KB
english, 2000
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