Boron segregation control in silicon crystal ingots grown in Czochralski process
Bok-Cheol Sim, Kwang-Hun Kim, Hong-Woo LeeVolume:
290
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2006.02.003
File:
PDF, 140 KB
english, 2006