Boron segregation control in silicon crystal ingots grown...

Boron segregation control in silicon crystal ingots grown in Czochralski process

Bok-Cheol Sim, Kwang-Hun Kim, Hong-Woo Lee
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Volume:
290
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2006.02.003
File:
PDF, 140 KB
english, 2006
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