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Deposition and characterization of ternary thin films within the Ti–Al–C system by DC magnetron sputtering
O. Wilhelmsson, J.-P. Palmquist, E. Lewin, J. Emmerlich, P. Eklund, P.O.Å. Persson, H. Högberg, S. Li, R. Ahuja, O. Eriksson, L. Hultman, U. JanssonVolume:
291
Year:
2006
Language:
english
Pages:
11
DOI:
10.1016/j.jcrysgro.2006.03.008
File:
PDF, 574 KB
english, 2006