The effects of several growth parameters on the formation behavior of point defects in Czochralski-grown silicon crystals
Hyon-Jong Cho, Bo-Young Lee, Jeong Yong LeeVolume:
292
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2006.04.023
File:
PDF, 907 KB
english, 2006