Hydrogen plasma etching mechanism on (0 0 1) diamond
Sung-Gi Ri, Hideyuki Watanabe, Masahiko Ogura, Daisuke Takeuchi, Satoshi Yamasaki, Hideyo OkushiVolume:
293
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.jcrysgro.2006.05.036
File:
PDF, 275 KB
english, 2006