Validating gallium nitride growth kinetics using a...

Journal of Crystal Growth 2006 Vol. 296; Iss. 1

Validating gallium nitride growth kinetics using a precursor delivery showerhead as a novel chemical reactor

Rinku P. Parikh, Raymond A. Adomaitis, Michael E. Aumer, Deborah P. Partlow, Darren B. Thomson, Gary W. Rubloff
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Volume:
296
Year:
2006
Language:
english
Pages:
12
DOI:
10.1016/j.jcrysgro.2006.07.031
File:
PDF, 464 KB
english, 2006
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