Threading dislocations in heteroepitaxial AlN layer grown by MOVPE on SiC (0 0 0 1) substrate
Yoshitaka Taniyasu, Makoto Kasu, Toshiki MakimotoVolume:
298
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2006.10.032
File:
PDF, 660 KB
english, 2007