Threading dislocations in heteroepitaxial AlN layer grown...

Threading dislocations in heteroepitaxial AlN layer grown by MOVPE on SiC (0 0 0 1) substrate

Yoshitaka Taniyasu, Makoto Kasu, Toshiki Makimoto
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Volume:
298
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2006.10.032
File:
PDF, 660 KB
english, 2007
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