Epitaxial lateral overgrowth of AlN on trench-patterned AlN...

Journal of Crystal Growth 2007 Vol. 298; Iss. none

Epitaxial lateral overgrowth of AlN on trench-patterned AlN layers

Masataka Imura, Kiyotaka Nakano, Gou Narita, Naoki Fujimoto, Narihito Okada, Krishnan Balakrishnan, Motoaki Iwaya, Satoshi Kamiyama, Hiroshi Amano, Isamu Akasaki, Tadashi Noro, Takashi Takagi, Akira B
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Volume:
298
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2006.10.043
File:
PDF, 693 KB
english, 2007
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