Influence of the reactor inlet configuration on the AlGaN growth efficiency
E.V. Yakovlev, R.A. Talalaev, N. Kaluza, H. Hardtdegen, H.L. BayVolume:
298
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2006.10.047
File:
PDF, 417 KB
english, 2007