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Effect of the crystal–melt interface on the grown-in defects in silicon CZ growth
Bok-Cheol Sim, Yo-Han Jung, Jai-Eun Lee, Hong-Woo LeeVolume:
299
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2006.11.217
File:
PDF, 277 KB
english, 2007