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Metamorphic molecular beam epitaxy growth and selective wet etching for epitaxial layer lift-off of AlAsSb toward optical waveguides with high optical confinement
Shin-ichiro Gozu, Kouichi Akahane, Naokatsu Yamamoto, Akio Ueta, Naoki Ohtani, Masahiro TsuchiyaVolume:
301-302
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.jcrysgro.2006.11.222
File:
PDF, 357 KB
english, 2007