Atomic layer deposition of aluminum oxide on hydrophobic...

Journal of Crystal Growth 2007 Vol. 299; Iss. 1

Atomic layer deposition of aluminum oxide on hydrophobic and hydrophilic surfaces

Nobuhiko P. Kobayashi, Carrie L. Donley, Shih-Yuan Wang, R. Stanley Williams
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Volume:
299
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2006.11.224
File:
PDF, 388 KB
english, 2007
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