The effect of substrate temperature on filtered vacuum arc...

The effect of substrate temperature on filtered vacuum arc deposited zinc oxide and tin oxide thin films

E. Çetinörgü, S. Goldsmith, R.L. Boxman
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Volume:
299
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.jcrysgro.2006.11.334
File:
PDF, 489 KB
english, 2007
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