Wet KOH etching of freestanding AlN single crystals
M. Bickermann, S. Schmidt, B.M. Epelbaum, P. Heimann, S. Nagata, A. WinnackerVolume:
300
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.jcrysgro.2006.12.037
File:
PDF, 1.35 MB
english, 2007