Multi-scale modeling of chemical vapor deposition processes for thin film technology
C.R. Kleijn, R. Dorsman, K.J. Kuijlaars, M. Okkerse, H. van SantenVolume:
303
Year:
2007
Language:
english
Pages:
19
DOI:
10.1016/j.jcrysgro.2006.12.062
File:
PDF, 1.41 MB
english, 2007