Selective epitaxial growth of AlN and GaN nanostructures on...

Selective epitaxial growth of AlN and GaN nanostructures on Si(1 1 1) by using NH3 as nitrogen source

S. Vézian, A. Le Louarn, J. Massies
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Volume:
303
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.jcrysgro.2007.01.007
File:
PDF, 842 KB
english, 2007
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