Simulation of growth rate and deposition profile on the periodically patterned substrate
Byung-Joon Baek, Sung-Ju Kang, Jin-Taek Kim, Bockchoon Pak, Cheul-Ro LeeVolume:
304
Year:
2007
Language:
english
Pages:
8
DOI:
10.1016/j.jcrysgro.2007.01.036
File:
PDF, 313 KB
english, 2007