Effect of gas flow on the selective area growth of gallium...

Effect of gas flow on the selective area growth of gallium nitride via metal organic vapor phase epitaxy

L.E. Rodak, K.R. Kasarla, D. Korakakis
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Volume:
306
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2007.03.063
File:
PDF, 611 KB
english, 2007
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