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In situ growth observation of GaN/AlGaN superlattice structures by simultaneous X-ray diffraction and ellipsometry
C. Simbrunner, Tian Li, A. Bonanni, A. Kharchenko, J. Bethke, K. Lischka, H. SitterVolume:
308
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2007.08.016
File:
PDF, 600 KB
english, 2007