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Selective silicon nanoparticle growth on high-density arrays of silicon nitride
Shawn S. Coffee, Davood Shahrjerdi, Sanjay K. Banerjee, John G. EkerdtVolume:
308
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.jcrysgro.2007.08.024
File:
PDF, 902 KB
english, 2007