High-quality diamond films grown at high deposition rates...

Journal of Crystal Growth 2007 Vol. 309; Iss. 2

High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber

Takahiro Nakai, Kazuya Arima, Osamu Maida, Toshimichi Ito
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Volume:
309
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.jcrysgro.2007.09.024
File:
PDF, 397 KB
english, 2007
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