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Influence of the process parameters on the characteristics of silicon-incorporated a-C:H:SiOx coatings
Batory, D., Jedrzejczak, A., Kaczorowski, W., Szymanski, W., Kolodziejczyk, L., Clapa, M., Niedzielski, P.Volume:
271
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2014.12.073
Date:
June, 2015
File:
PDF, 598 KB
english, 2015