Influence of annealing temperature on passivation...

Chinese Physics B 2013 / 12 Vol. 22; Iss. 12

Influence of annealing temperature on passivation performance of thermal atomic layer deposition Al 2 O 3 films

Zhang, Xiang, Liu, Bang-Wu, Zhao, Yan, Li, Chao-Bo, Xia, Yang
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Volume:
22
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/22/12/127303
Date:
December, 2013
File:
PDF, 1.30 MB
english, 2013
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