Optical and structural characteristics of ZnO films grown...

Journal of Crystal Growth 2008 Vol. 310; Iss. 12

Optical and structural characteristics of ZnO films grown on (0 0 0 1) sapphire substrates by ALD using DEZn and N2O

Ping-Yuan Lin, Jyh-Rong Gong, Ping-Cheng Li, Tai-Yuan Lin, Dong-Yuan Lyu, Der-Yuh Lin, Hung-Ji Lin, Ta-Ching Li, Kuo-Jen Chang, Wen-Jen Lin
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Volume:
310
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.jcrysgro.2008.03.016
File:
PDF, 683 KB
english, 2008
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